TYPES OF INDUSTRIAL GASES IN SEMICONDUCTOR PRODUCTION

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Industrial gases play a crucial role in many industries, and semiconductors are no exception. Semiconducting materials are used in various industries such as equipment manufacturing, electronic components, and more. Therefore, semiconductor production has become a race in many advanced industries today. To gain a competitive advantage, two determining factors are quality and cost. Hence, an important factor that affects these two determining factors is industrial gases.

The production of semiconductors requires the participation of various types of industrial gases, such as nitrogen gas, hydrogen gas, and oxygen gas. Industrial gases have numerous applications in semiconductor production. Some industrial gases used in semiconductor production include:

  • Nitrogen gas (N2): Nitrogen is a colorless, odorless, and non-flammable gas. N2 is widely used in the semiconductor industry to create an oxygen-free environment, preventing oxidation and stabilizing semiconductor production processes. N2 is also used for cleaning and protecting sensitive surfaces of semiconductors during processing and manufacturing.
  • Hydrogen gas (H2): Hydrogen is a colorless, odorless, and highly flammable gas. It is used in the semiconductor industry to create a vacuum or non-reactive environment. H2 is also used in semiconductor production processes such as epitaxy, surface cleaning, and bond formation.
  • Oxygen gas (O2): Oxygen is a colorless, odorless gas that forms compounds with various substances. In semiconductor production, O2 is used in melting and oxidizing materials like silicon to create thin semiconductor layers.
  • Ammonia gas (NH3): Ammonia is a gas with a distinctive odor and is easily soluble in water. In the semiconductor industry, NH3 is used as a background material for surface cleaning, nitrogen supply during epitaxy, and alkaline environment creation during processing.

Industrial gases play a vital role in semiconductor production. These gases are used to perform production, processing, and testing processes for semiconductors. Below are some semiconductor production processes that utilize industrial gases:

  • Air environment creation: Nitrogen and argon gases are commonly used to create an air environment in semiconductor production processes. The air environment helps protect semiconductor materials from external influences.
  • High-quality semiconductor production: Pure gases such as nitrogen, hydrogen, oxygen, and gas mixtures are used to produce semiconductors. Pure gases ensure the properties and quality of the final products.
  • Surface treatment of semiconductors: HF gas and oxygen gas are used to treat the surfaces of semiconductors, creating protective layers. These coatings can improve the properties of semiconductors and enhance product performance.
  • Product quality testing: Different gases such as helium and argon are used to test the quality of semiconductor products. For products like semiconductor wafers, helium gas is often used to test the gas tightness of materials.
  • Product transportation and storage: Industrial gases are also used for the transportation and storage of semiconductor products, especially in wafer production and transportation processes. Argon and xenon gases are commonly used as carrier gases in these processes.

High-quality industrial gases contribute to the improved quality of semiconductors, enhancing their competitiveness in today’s highly competitive environment.

If you need an industrial gas supplier that provides high-purity gases with clear certifications, please contact Sing Industrial Gas Vietnam, the leading industrial gas manufacturer in Vietnam. Call the hotline at 0937200655 to receive advice on suitable gases for your needs.

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